??????????????(?? FSM?? ??)? 2008? 8?? ???? ????? ??????? ??.??.??? ???? ?????. 2008? 8? ??? ???? ??????? ??? ?? ? 1200????? ??? ???? 60?? ???? ?? ???? ??? ???? ??? ?? ???? ???? 5???? ??? ???? ?? ???? ?? ???? ????. ??? ????? ??? ????. 3,4??? MEMS??????? ?????, ????? ????? ???? ...